Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor

Film bulk acoustic-wave resonator based ultraviolet sensor

This letter described ultraviolet UV radiation sensing with ZnO based film bulk acoustic-wave resonator FBAR . The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 W /cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to ...

High-Overtone Bulk Acoustic Resonator

Thin film bulk acoustic wave resonators: a technology overview

This paper describes a high quality thin film piezoelectric aluminium nitride technology developed for applications in bulk acoustic wave resonators and filters. The fabrication of both SMR and FBAR resonators is described, and the main characteristics of these devices are reviewed.

ZnO Film Bulk Acoustic Resonator for the Kinetics Study of Human Blood Coagulation

Miniaturized and rapid blood coagulation assay technologies are critical in many clinical settings. In this paper, we present a ZnO film bulk acoustic resonator for the kinetic analysis of human blood coagulation. The resonator operated in thickness shear resonance mode at 1.4 GHz. When the resonator contacted the liquid environment, the viscous loading effect was considered as the additional r...

Design and Analysis of Film Bulk Acoustic Resonator (FBAR) Filter for RF Applications

The RF band pass filters are important for wireless communication applications. They can be realized using Thin Film Bulk Acoustic Resonator (TFBAR).TFBAR is designed using Aluminium Nitride (AlN) and electrodes of piezoelectric material are made with Platinum (Pt).Various modelling techniques has been used for realizing three layered TFBAR structure. Modified Butter w...